The outlet pressure of all those pumps were not lower than 0.1 Torr, and it follows that those pumps can run well by using directly the mechanical vacuum pumps as backing pumps without booster pump used. 所有这些泵的最大出口压力不低于0.1Torr,因此前级泵可直接用机械真空泵,不必用增压泵即能正常工作。
In this paper, according to one-dimension flowing theory of ideal gas, calculation formulas of critical backing, pressure and diffuser throat diameter of oil vapour pump are introduced, and then some methods of improving critical backing pressure are discussed. 本文根据流体力学理想气体一维流动的理论,导出了油蒸汽流泵的临界前级压力和扩压器喉部直径的计算公式,并且讨论了提高临界前级压力的措施。
Grade. Calculation of Critical Backing Pressure and Diffuser Throat Diameter of Oil Vapour Pump 油蒸汽流泵的临界前级压力及扩压器喉部直径的计算
In the multistation exhaust system a mechanic pump is used as the backing pump and molecular pump as the main integral part to form a high vacuum system. 由机械泵为前级泵,分子泵为主抽泵构成高真空系统,对高压开关管进行真空排气;